| Major Categories |
Sub-Categories |
Equipment Examples |
| A |
Semiconductor Design Equipment |
|
|
Pattern Generator, Plotter, Engineering Workstation, Logic Simulator, Circuit Simulator, Design Equipment, Logic Analyzer, Others |
| B |
Mask/Reticle Mfg. Equipment |
1 |
Photolithography Processing Equipment |
Electron Beam Exposure Equipment, Laser Exposure Equipment, Pattern Generator, Contact Printer, Photo Repeater, Coater, Resist Stripper, Develop / Bake / Descum Equipment |
| 2 |
Thin Film Deposition, Etching, Cleaner, & Dryer |
Vacuum Evaporation Equipment, Sputter, CVD, Cleaner, Etcher, Dryer, Scrubber |
| 3 |
Inspection and Metrology Equipment & Others |
Mask/Reticle Defect Inspector, Defect Corrector, Mask Particle Inspector, Defect Inspector |
| C |
Wafer Manufacturing Equipment |
1 |
Single Crystal Manufacturing Equipment |
Single Crystal Growing Furnace |
| 2 |
Wafer Processing Equipment |
Slicer, Lapping Equipment, Polishing Equipment, Grinding Equipment, Wafer Marking Equipment |
| 3 |
Inspection and Metrology Equipment & Others |
Life Measuring Equipment, Crystal Defect Detector, In process measuring Equipment, Other Measuring Equipment |
| D |
Wafer Processing Equipment |
1 |
Exposure & Direct Write Equipment |
Contact Proximity Aligner, Projection Aligner (equal magnification, reduction), Electron Beam Exposure Equipment |
| 2 |
Photoresist Processing Equipment |
Coater, Developer, Resist Stripping Equipment,
Ashinｇ Equipment, Baking Equipment, Resist Stabilizing Equipment, Wafer Peripheral Exposure Equipment |
| 3 |
Dry Etch Equipment |
Dry Etch Equipment |
| 4 |
Surface Conditioning Equipment |
Wet Etching Equipment, Dry Cleaning Equipment, Wet Cleaning Equipment, Wafer Scrubber, Drying Equipment, High Pressure Jet Cleaner |
| 5 |
Thermal Process Equipment |
Oxidation Equipment, Thermal Diffusion Furnace, Annealing Equipment |
| 6 |
Ion Implantation Equipment |
High Current Ion Implanter, Medium Current Ion Implanter, High Voltage Ion Implanter, Doping Equipment |
| 7 |
Thin Film Deposition Equipment |
| 7-1. CVD Equipment |
Atmospheric Pressure CVD, Subatomospheric CVD, Low Pressure CVD, Plasma Enhanced CVD, MetalCVD, ALD |
| 7-2. Sputtering Equipment |
Sputtering Equipment |
| 7-3. Other Thin Film Deposition Equipment |
Vacuum Evaporation Equipment, Silicon Epitaxial Growing Equipment, Compound Semiconductor Epitaxial Equipment(MOCVD,MBE), Plating Equipment, Spin on tool |
| 8 |
Metrology & Inspection Equipment |
Defect Inspector, Particle Inspecter, Dust counter , CD SEM , Film Thickness Inspector, Reflectance Measurement, Auger Electron Spectroscope, Infrared Spectro-photometer, Sheet Resistance Measurement, Life Time Measurement, Other Measuring & Analysing |
| 9 |
CMP Equipment |
CMP Equipment, CMP Cleaning Equipment |
| 10 |
Other Wafer Process Equipment |
Wafer Marking, Mark Reader, Bump Plating , Back Grinder Tape Sticker, Back Grinder , Back Grinder Tape Peeler, Backside Etcher |
| E |
Assembly & Packaging Equipment |
1 |
Dicing Equipment |
Scriber, Dicer, Wafer Mounting Equipment |
| 2 |
Bonding Equipment |
ie Bonder, Hybrid Bonder, Wire Bonder, Inner-Lead Bonder, Outer-Lead Bonder, Flip-chip Bonder |
| 3 |
Packaging Equipment |
Molding Equipment, Deflasher, Sealing Furnace, Solder Plating Equipment, Solder Ball Mounter, Trim & Forming Equipment, Marker |
| 4 |
Test, Evaluation & Other Assembly Equipment |
Package Inspector, Leak Detector, Pull Tester, X-ray Equipment, Lead Inspector, Other Measuring Equipment |
| F |
Test / Inspection Equipment |
1 |
Automated Test Equipment |
| 1-1. SOC & Logic Test Equipment |
Logic Test Equipment, ASIC Verification Equipment |
| ( 1-3 Linear & Mixed Signal Equipment ) |
Linear Test Equipment, Mixed Signal Test Equipment, Analog Test Equipment, SOC Tester |
| ( 1-4 Other Test Equipment ) prev. |
Transistor Test Equipment, LED Test Equipment, Image Sensor Test Equipment, Electron Beam Test Equipment, Laser Beam Test |
| 1-2. Memory Test Equipment |
Memory Test Equipment |
| 2 |
Prober Equipment |
Prober |
| 3 |
Handler |
Handler |
| 4 |
Aging Equipment |
Aging Equipment, Burn-in Equipment, IC Inserting Equipment, IC Removing Equipment |
| 5 |
Other Test/Inspection Equipment |
Temperature Testing, Humidity Testing, Shock Testing, Pressure Cooker, Leak Detector, Laser Processing Equipment, Vibration Testing, Various Life Measuring, Waveform Analyzer, Other Measuring Equipment |
| G |
Fab Facility & Related Equipment |
1 |
Factory Automation Equipment |
Intra-Bay Wafer Transportation Equipment, Inter-Bay Wafer Transportation Equipment, Stocker |
| 2 |
DI Water & Chemicals Control Equipment |
DI Water Producing, Ultrafiltering, Reverse Osmosis, Sterilizing, Chemicals Suppling, Slurry Suppling, Chemical Purifing, Waste Cntorol |
| 3 |
Various Gas Control Equipment |
Gas Producing Equipment, Gas Purifing Equipment, Gas Mixing Equipment, Gas Detecting Equipment, Gas Scrubber |
| 4 |
Clean Room Facility |
Clean Bench, Clean Tunnel, Thermal Chamber, Enviromental Chamber, Air Shower, Pass Box |
| 5 |
Others Manufacturing Related Equipment |
Controling, Central Monitoring, Jig Cleaner & Dryer, Flow Controlling, Taping, Packaging, Gas Measuring or Analyzing |
